HAPS Probe Station

4~12 inch set ups. Modular design, highly cost-effective and can be upgraded as your requirements changes.

In order to acquire accurate and reliable test results in the cutting edge tests, one of the key factors is to use a probe station system with ultra mechanical accuracy and stability.

HAPS is built on a granite base with less than 5 micron planarity. This design not only assures the high planarity in X-Y motion but also provides a rigid and stable platform for high accuracy tests. To achieve positioning accuracy, we use precise micrometer heads to drive spring loaded X-Y axes. With an air bearing X-Y stage, user will be able to move the X-Y in coarse positioning smoothly and quickly, thus greatly reducing set up time and improving test efficiency. One of the most common applications of HAPS is millimeter wave device characterization. The accuracy and stability act as an important role in protection of fragile and expensive mmW probes while producing reliable test results.

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Description

In order to acquire accurate and reliable test results in the cutting-edge tests, one of the key factors is to use a probe station
system with ultra mechanical accuracy and stability.
HAPS is built on a granite base with less than 5-micron planarity. This design not only assures the high planarity in X-Y motion but also provides a rigid and stable platform for high accuracy tests. To achieve positioning accuracy, we use precise micrometer heads to drive spring loaded X-Y axes. With an air bearing X-Y stage, user will be able to move the X-Y in coarse positioning smoothly and quickly, thus greatly reducing set up time and improving test efficiency. One of the most common applications of HAPS is millimeter wave device characterization. The accuracy and stability act as an important role in protection of fragile and expensive mmW probes while producing reliable test results.

TWO Set Ups for HAPS

HAPS with a Slim scope is generally set up for High-performance RF, multi-contact/mixed signal probing, Single-ended broadband/mm Wave, THz, source/load pull, RF noise probing. All these measurements require the system to be ultra-accurate and stable for ensure reliable measurement output. Slim Scope and Super scope are interchangeable.

HAPS with a Super scope is generally set up for probing on tiny geometric structures of wafer level reliability
tests, failure analysis, high power tests, etc. HAPS’ intuitive manipulation enables users focus more on their measurements rather than manipulation. Slim scope and Super scope are interchangeable.

Chuck – Standard
Diameter 8″ to 12″
Material Stainless Steel
Plating N.A.
Planarity <5µm@Ambient Temperature

 

Chuck Stage – AccuStage
X-Y travel range (Coarse) 8″ to 12″. Air bearing for smooth coarse movement
X-Y travel range (fine) 25mm*25mm
Resolution 1μm
Theta travel range (fine) ±9°
Theta resolution 0.0001°/deg
Theta travel range (coarse) 360°
Z travel range 10mm
Resolution 1μm
Z Contact and Separation 0~5mm
Z repeatability <1μm

 

Platen – Standard DC Application
Material Steel, Ni-Plated
Space For up to 10 DCP100 or 2 RFP100-mmW. Can be customized for more positioners.
Mounting Compatibility Magnetic and vacuum mounting
Height Adjustment 45mm
Repeatability <1μm

 

Microscope Options
Stereo Microscope Steel, Ni-Plated
SlimScope 12X Zoom
Superscope 20X~2000X
Three types of microscopes are available upon request. Magnifications of SlimScope or Superscope will vary according to objective lens.

 

Microscope Mounting & Movements
Rigid Bridge for Stereo microscope, Superscope, or SlimScope
X-Y travel range (fine) 25mm*25mm, larger travel range (50mm) available upon request
Resolution 1μm
Pneumatic lift 40mm
Manual lift 50mm

 

Eletrical Measurement Accuracy (Current)
Part # Range Accuracy
BIV 1μA rdg+10nA
COAX 1nA rdg+10pA
COAX-PIV 1nA rdg+10pA
TRIAX 10pA rdg+100fA
TRIAX-FemtoProbe 1～10pA rdg+10fA

 

Electrical Performance (C-V Measurement)
Current leakage <10fA
Frequency >150MHz
Capacitance <10fF
Impedance 50 Ohm
*Capacitance is measured by Keysight 4980A LCR. Probe station set up: IPS-COAX-AS-Stereo, DCP100(2SET) , CPA-10(2SET) with 10 micron
probe tips on a gold pad. 1 meter coax cable, 4-terminal-pair connection. Room Temperature 25℃, RH<45%.

 

Ordering Information
HAPS-SlimScope-5X Probe Station with AccuStage, SlimScope(5X objective). Other magnifications available upon request.
HAPS-SuperScope-2/10/20X Probe Station with AccuStage Superscope(2X, 10X, 20X objective). Other magnifications available upon request.

Features

Features
Application oriented Kitstart test kits provide know-how test methods and techniques for various applications.
Highly stable and accurate Built on a granite base with <5 micron planarity, which provides the stability and accuracy crucial to highly reliable test results.
Slimscope and Superscope Slimscope for tests that require space besides the microscope (mmW test, etc.) and Superscope for high magnification requirements.
Cost-effective The most cost-effective system among the products of the same grade.

Downloads

Adobe PDF

HAPS Probe Station Technical Specs Series Datasheet

Language: English

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