Temperature Regulating Systems (Hot Chucks)

Description

Low noise – 24V DC heating cartridge, less EMI, suitable for low noise measurement.
Safety – 24V low voltage DC power output. NO worry about electric shock.
Wide temperature range – From room temperature to 200℃. Larger range available upon request.
Accurate – ±0.1% accuracy controller; IEC 60751 F0.15 standard PT100 temperature sensor.
Stable – Proactive functions of controller suppress overshoot and provide fast and stable control.
Uniform – Less than ± 0.5℃ of target temperature @ 6 inch chuck.

Chuck
Diameter	4~8 inch; larger dia. available upon request.
Material	Copper
Coating	Type II gold plated
Planarity	≤10 µm @ 25°C
	≤30 µm @ 200°C
	≤40 µm @ 300°C
Sample holding	Vacuum ring pattern. Others available upon request.
Vacuum actuation	Vacuum pump.
Heat isolation	PTFE

Temperature Control
Range	Room temperature ~ 200°C
Resolution	0.1°C
Accuracy	±0.1% of reading digits
Uniformity	Room temperature ~ 200°C
Heating	DC heating cartridge
Cooling	Water@RT
Sensor	PT100 temperature sensor; IST or Jumo; IEC 60751 F0.15 standard.
Temp. rise time	20 min (RT~200°C)
Temp. cooling time	5 min (200°C~RT), RT water cooler

Electrical Performance
Probe leakage current	Room temperature ~ 200°C
Chuck leakage current	0.1°C
Chuck as test port	Can be connected to test instrument with optional cable assemblies
* Tested on an IPS probe station with Femtoprobe.

Power
Input	220V or 110V AC
Output	24V DC

Ordering Information
CK-4IN-RT-200	4 inch chuck with temperature controller and cable assemblies.
CK-6IN-RT-200	6 inch chuck with temperature controller and cable assemblies.
CK-8IN-RT-200	8 inch chuck with temperature controller and cable assemblies.
WC-RT	Water cooler, air cooled.
WC-0530	Water cooler, water temperature can be controlled from 5 to 30℃.

Language: English

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